Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (112¯0) textured ZnO films
Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (112¯0) textured ZnO films
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DOI：
10.1063/1.2752133
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发表时间：
2007-07
影响因子：
3.2
通讯作者：
T. Yanagitani;M. Kiuchi;M. Matsukawa;Yoshiaki Watanabe
中科院分区：
文献类型：
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作者：
T. Yanagitani;M. Kiuchi;M. Matsukawa;Yoshiaki Watanabe
ZnO薄膜是一种具有（112 <$0）织构的薄膜，其微晶c轴位于衬底平面内，是一种很好的剪切模式压电器件的候选材料。研究了（112 <$0）织构ZnO薄膜中晶粒取向度与剪切模机电耦合系数k15之间的关系。制备了40个由（112 <$0）织构ZnO薄膜组成的纯剪切模高泛音体声波谐振器。该膜在微晶排列和膜厚度方面是变化的。通过X射线极图分析确定薄膜的微晶排列程度。从谐振器的转换损耗特性估计膜的k15值。一个显着的相关性之间的分散体的X射线极点和k15值。然而，在较薄的膜中的k15值明显减少，与那些在较厚的膜相比，尽管它们的相似之处，在微晶排列。此外，意想不到的S…
ZnO film, in which the crystallite c axis lies in the substrate plane [(112¯0) textured ZnO], is a good candidate for application in shear mode piezoelectric devices. The relationships between the degree of crystallites alignment and the shear mode electromechanical coupling coefficient k15 in (112¯0) textured ZnO films have been investigated. Forty pure-shear mode high overtone bulk acoustic resonators consisting of the (112¯0) textured ZnO film were prepared. The film was varied in crystallites alignment and film thickness. The degrees of crystallites alignment of the films were determined by x-ray pole figure analysis. The k15 values of the films were estimated from the conversion loss characteristics of the resonators. A significant correlation was observed between dispersion of the x-ray poles and the k15 values. However, the k15 values in the thinner films were clearly reduced as compared with those in the thicker films despite their similarities in crystallites alignment. In addition, unexpected se...