Electro-thermal modeling and experimental validation for multilayered metallic microstructures
Electro-thermal modeling and experimental validation for multilayered metallic microstructures
复制标题
多层金属微结构的电热建模与实验验证
DOI：
10.1007/s00542-020-04964-w
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发表时间：
2020-08-06
影响因子：
2.1
通讯作者：
Shi, Yong
中科院分区：
文献类型：
--
作者：
Ren, Zhongjing;Yuan, Jianping;Shi, Yong
本文提出了一种电热模型的多层金属微结构，能够部署时，热驱动垂直。提出了一种典型的微结构设计，并描述了其工作原理。建立了集总模型，得到了焦耳热驱动时温度分布的解析解，与有限元分析结果吻合较好。随后进行了微结构的制作和实验测试，并结合扫描电子显微镜（SEM）和随温度变化的电测量来确定微结构在SEM中以0.56 mW的恒定功率加热时的原位温度。由实验得到的峰值温度约为333 K，而由集总模型和有限元模型模拟的峰值温度分别为330.99和331.85 K。所提出的多层微结构在微机器人驱动器中显示出巨大的应用潜力，集总模型为基于不同要求的此类微结构的设计和优化提供了有效的工具。
This paper proposes an electro-thermal modeling on multilayered metallic microstructures that are able to deploy vertically when thermally actuated. A typical design of such microstructures is presented, and the working principle is described. A lumped model is established to find the analytical solution to the temperature distribution when actuated by Joule heating, which shows a good agreement with the results from finite element analysis (FEA). Fabrication and experimental testing of the microstructure are followed, and scanning electron microscopy (SEM) and temperature-dependent electrical measurement are combined to determine the in-situ temperature when the microstructure is heated with a constant power of 0.56 mW in SEM. The peak temperature derived from the experiment is approximately 333 K, while the peak temperature simulated by the lumped model and FEA model are 330.99 and 331.85 K, respectively. The proposed multilayered microstructures show great potential for applications in microrobotic actuators, and the lumped model offers an effective tool for the design and optimization of such microstructures based on diverse requirements.