Laser ablation on nanoscales
Laser ablation on nanoscales
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纳米级激光烧蚀
DOI：
10.1117/12.780065
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
Z. Liu
中科院分区：
文献类型：
--
作者：
Z. B. Wang;W. Guo;B. Luk’yanchuk;A. Pena;L. Li;Z. Liu
纳米级空间分辨率的烧蚀需要特殊的工具来克服传统的衍射极限。有几种方法已成功地应用于这一目的。其中包括：表面纳米结构的激光照射尖端;近场扫描光学显微镜（NSOM）的纳米图案化;表面纳米加工的基础上的光学共振和近场效应与透明颗粒，以及场增强等离子体纳米粒子。所有这些方法允许在超过100 nm的尺度上进行局部激光烧蚀。本文报道了我们最近的工作，涉及场增强的激光照射尖端，近场激光烧蚀透明粒子和场增强的等离子体效应。
Ablation with nanoscale spatial resolution needs special tools to overcome conventional diffraction limit. A few methods have been successfully applied for this purpose. These include: surface nanostructuring by laser illuminated tip; Near-field Scanning Optical Microscopy (NSOM) nano-patterning; Surface nano-processing based on optical resonances and near-field effects with transparent particles as well as the field enhancement by plasmonic nanoparticles. All these methods permit localized laser ablation on the scale beyond 100 nm. In this paper we report our recent work related to field enhancement by laser illuminated tip, near-field laser ablation with transparent particles and field enhancement by plasmonic effects.