X-ray mirror metrology using SCOTS/deflectometry
X-ray mirror metrology using SCOTS/deflectometry
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DOI：
10.1117/12.2024500
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发表时间：
2013-09
期刊：
影响因子：
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通讯作者：
R. Huang;P. Su;J. Burge;M. Idir
中科院分区：
文献类型：
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作者：
R. Huang;P. Su;J. Burge;M. Idir
SCOTS是一种基于偏折法的高精度坡度测量技术。LCD显示器上的光图案照亮测试表面，其反射图像用于计算表面斜率。SCOTS提供了一个高动态范围的全场测量的光学不需要零光学。我们报告的SCOTs测试的X射线反射镜的纳米甚至亚纳米级的测试系统的精确校准。将具有点/检查板图案的LCD屏幕在测试镜位置处对准到系统中以原位校准相机成像失真。通过测试和减去也在与测试镜相同的位置对准的参考平面，进一步消除了系统误差。计算基于测试表面理想形状的虚拟参考，并从测试原始数据中减去。这使得测试成为“虚拟空”测试。两个X射线反射镜进行了测试与SCOTs。获得了0.1μrad（rms）的斜率精度和亚nm（rms）的表面精度。
SCOTS is a high precision slope measurement technology based on deflectometry. Light pattern on a LCD display illuminates the test surface and its reflected image is used to calculate the surface slope. SCOTS provides a high dynamic range full field measurement of the optics without null optics required. We report SCOTS tests on X-ray mirrors to nm and even sub nm level with precise calibration of the test system. A LCD screen with dots/check board pattern was aligned into the system at the test mirror position to calibrate camera imaging distortion in-situ. System errors were further eliminated by testing and subtracting a reference flat which was also aligned at the same position as the test mirror. A virtual reference based on the ideal shape of the test surface was calculated and subtracted from the test raw data. This makes the test a ‘virtual null’ test. Two X-ray mirrors were tested with SCOTS. 0.1μrad (rms) slope precision and sub nm (rms) surface accuracy were achieved.