Atomic scale KMC simulation of {100}-oriented CVD diamond film growth under low substrate temperture - Part II Simulation of CVD diamond film growth in C-H system and in Cl-containing systems
Atomic scale KMC simulation of {100}-oriented CVD diamond film growth under low substrate temperture - Part II Simulation of CVD diamond film growth in C-H system and in Cl-containing systems
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低温下{100}取向CVD金刚石薄膜生长的原子级KMC模拟-第二部分C-H体系和含Cl体系中CVD金刚石薄膜生长的模拟
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通讯作者：
Shengxin Liu
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作者：
Xizhong An;Yu Zhang;Guoquan Liu;Xiangge Qin;Fuzhong Wang;Shengxin Liu
