Fast and Accurate Shape Measurement System Utilizing the Fringe Projection Method with a Ferroelectric Liquid-Crystal-on-Silicon Microdisplay
Fast and Accurate Shape Measurement System Utilizing the Fringe Projection Method with a Ferroelectric Liquid-Crystal-on-Silicon Microdisplay
复制标题
采用条纹投影法和铁电硅基液晶微显示器的快速、准确的形状测量系统
DOI：
10.1117/1.oe.51.8.081506
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发表时间：
2012
影响因子：
1.3
通讯作者：
M. Sakam H. Tanaka
中科院分区：
文献类型：
--
作者：
S. Ri;T. Muramatsu;M. Sakam H. Tanaka
采用相移技术的条纹投影法具有测量速度快、测量精度高等优点。条纹投影系统的性能，包括图像质量、投影强度的非线性度、稳定性以及多个相移图案的切换时间，对于快速准确的形状测量是至关重要的。利用铁电硅基液晶微显示器和大功率发光二极管光源，研制了一种快速、准确的测量系统。结果表明，与普通的商用液晶投影仪相比，该投影仪的投影光强的非线性度和条纹投影的稳定性都有了显著的改善。利用研制的系统对倒装芯片球栅阵列电子封装的翘曲分布进行了快速测量。在S仪器上记录了9幅像素分辨率的相移条纹图像，并与测微仪和激光焦距传感器的测量结果进行了比较，符合较好。在6 mm测量范围内，平均误差为2.6微米，标准偏差小于10微米。
Fringe projection methods using the phase-shifting technique have the advantages of fast 3-D shape measurement and high accuracy. The performance of the fringe projection system, including image quality, nonlinearity of the projected intensity, stability, and switching time for multiple phase-shifted patterns, is essential for fast and accurate shape measurement. A fast and accurate measurement system using a ferroelectric liquid-crystal-on-silicon microdisplay and a high-powered light emitting diode light source is developed. Our results indicate that the nonlinearity of the projected intensity and the stability of the fringe projection were dramatically improved compared with an ordinary commercial liquid crystal display projector. The rapid measurement of the warpage distribution of a flip chip ball grid array electronic package was performed by using the developed system. Nine phase-shifted fringe images with a resolution ofpixels were recorded in 1.6 s. In addition, the measurement results obtained by our system agreed well with the results obtained from a micrometer and laser focus sensor. The average error was 2.6µm, and the standard deviation was less than 10µm with a 6-mm measurement range.