Image formation in the scanning helium microscope
Image formation in the scanning helium microscope
复制标题
DOI：
10.1016/j.ultramic.2018.05.004
复制
发表时间：
2018-09-01
期刊：
影响因子：
2.2
通讯作者：
Dastoor, P. C.
中科院分区：
文献类型：
--
作者：
Fahy, A.;Eder, S. D.;Dastoor, P. C.
扫描氦显微镜（SHeM）是现有显微镜阵列的新成员，特别适用于在利用光或带电粒子的技术下可能遭受损坏的精细材料。与所有其他显微镜一样，需要了解仪器内图像形成的具体情况，以充分了解所产生的显微照片。我们详细介绍了SHeM主题的基础知识，包括由于散射几何而产生的投影扭曲的具体性质。这些概念的扩展允许迭代光线追踪蒙特卡罗模型复制从样品表面漫射散射被构造。实验数据与模拟结果的对比表明，该仪器的最小可分辨阶跃高度为(67 + 5)μ m，最小可分辨平面角为（4.3 + 0.3）度。(C) 2018 Elsevier B.V.版权所有
The scanning helium microscope (SHeM) is a new addition to the array of available microscopies, particularly for delicate materials that may suffer damage under techniques utilising light or charged particles. As with all other microscopies, the specifics of image formation within the instrument are required to gain a full understanding of the produced micrographs. We present work detailing the basics of the subject for the SHeM, including the specific nature of the projection distortions that arise due to the scattering geometry. Extension of these concepts allowed for an iterative ray tracing Monte Carlo model replicating diffuse scattering from a sample surface to be constructed. Comparisons between experimental data and simulations yielded a minimum resolvable step height of (67 + 5) mu m and a minimum resolvable planar angle of (4.3 + 0.3)degrees for the instrument in question. (C) 2018 Elsevier B.V. All rights reserved.