Dielectric properties of La/Mn codoped Ba0.63Sr0.37TiO3 thin films prepared by RF magnetron sputtering
Dielectric properties of La/Mn codoped Ba0.63Sr0.37TiO3 thin films prepared by RF magnetron sputtering
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DOI：
10.1016/j.ceramint.2014.04.039
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发表时间：
2014-09
影响因子：
5.2
通讯作者：
Lirong Song;Ying Chen;Genshui Wang;Lihui Yang;Tao Li;Feng Gao;Xianlin Dong
中科院分区：
文献类型：
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作者：
Lirong Song;Ying Chen;Genshui Wang;Lihui Yang;Tao Li;Feng Gao;Xianlin Dong
采用射频磁控溅射法在LaNiO 3涂层的Si衬底上制备了La/Mn共掺杂Ba0.63Sr0.37TiO3（BST）薄膜。我们还制备了纯BST和La掺杂BST薄膜进行比较。结果表明，在700 kV/cm下，适量La/Mn共掺杂提高了BST的介电调谐率（59.6%），降低了介电损耗（tan δ=0.0170），提高了品质因数（FOM=35.06）。这一工作表明，La/Mn共掺杂可以是一种有效的方法，以获得高的可调谐性和低损耗角正切。
La/Mn codoped Ba0.63Sr0.37TiO3(BST) films were grown on LaNiO3-coated Si substrates via RF magnetron sputtering. We also fabricated pure BST and La-doped BST films for comparison. Results show that moderate La/Mn codoping improves dielectric tunability (59.6%) as compared to pure BST (28.2%) at 700 kV/cm, and yields lower dielectric loss (tanδ=0.0170) and higher figure of merit (FOM=35.06) comparing with La-doped BST (tanδ=0.0242, FOM=26.32). This work demonstrated that La/Mn codoping could be an effective method to obtain high tunability and low loss tangent.