PIEZORESISTIVE CANTILEVERS UTILIZED FOR SCANNING TUNNELING AND SCANNING FORCE MICROSCOPE IN ULTRAHIGH-VACUUM
PIEZORESISTIVE CANTILEVERS UTILIZED FOR SCANNING TUNNELING AND SCANNING FORCE MICROSCOPE IN ULTRAHIGH-VACUUM
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DOI：
10.1063/1.1145232
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发表时间：
1994-06-01
影响因子：
1.6
通讯作者：
TRAFAS, BM
中科院分区：
文献类型：
--
作者：
GIESSIBL, FJ;TRAFAS, BM
压阻式微悬臂梁已被用于一种新型的微悬臂梁真空扫描探针显微镜，该显微镜可用于原位扫描隧道显微镜（STM）、接触式原子力显微镜（AFM）和非接触式原子力显微镜。该仪器使用可互换的钨针尖（用于STM成像）和压阻式微杆（用于AFM或STM成像），并能够在STM和AFM操作模式下实现原子分辨率。使用高精度旋转/线性馈通和尖端/悬臂存储系统，在真空条件下快速可靠地进行原位尖端交换。压阻式力敏杠杆为原子力显微镜提供了一种新的检测方案，它使用全电子检测器，不需要对准或光学检测系统。该显微镜具有高分辨率、双轴、惯性驱动平移载物台，并带有开放式样品架，旨在优化振动隔离。
Piezoresistive cantilevers have been utilized in a novel ultrahigh vacuum scanning probe microscope which allows in situ scanning tunneling microscopy (STM), contact atomic force microscopy (AFM), and noncontact atomic force microscopy. The instrument uses interchangeable tungsten tips (for STM imaging) and piezoresistive cantilevers (for AFM or STM imaging) and is capable of atomic resolution in both STM and AFM modes of operation. In situ tip exchange under vacuum conditions is performed quickly and reliably using a high precision rotary/linear feedthrough and a tip/cantilever storage system. Piezoresistive force-sensing cantilevers provide a new detection scheme for AFM, using an all-electronic detector that requires no alignment or optical detection system. The microscope features a high-resolution, dual-axis, inertial-drive translation stage with an open access sample mount designed to optimize vibration isolation.