High-Rigidity Multi-Degrees-of-Freedom Fine Motion Mechanism using Piezoelectric Actuators.
High-Rigidity Multi-Degrees-of-Freedom Fine Motion Mechanism using Piezoelectric Actuators.
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使用压电执行器的高刚性多自由度精细运动机构。
DOI：
10.2493/jjspe.60.1355
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发表时间：
1994
期刊：
影响因子：
--
通讯作者：
A. Kyusojin
中科院分区：
文献类型：
--
作者：
T. Oiwa;Katsumi Kaneko;T. Kaneko;A. Kyusojin
本文提出了一种新型的五自由度高刚性精细运动机构，并介绍了新研制的三自由度机构的结构特点和实验结果。该机构由三个楔形板和六个多层压电致动器组成。该机构不需要导轨，也不需要润滑，使其运动无摩擦，无磨损，无碰撞。工作台在x方向上最大移动3 μm，在z方向上最大移动12μm，在β方向上最大移动12秒。平移方向和旋转方向的定位分辨率分别小于0.01μm和0.01 s弧。承载能力400N。定位误差和运动误差分别小于±0.01μm和±0.03秒弧。由于压电致动器的收缩和膨胀速度不同，x方向1 μm步长定位会对其他方向产生短暂干扰。
In this paper, a new five-degrees-of-freedom fine motion mechanism whose rigidity is high is proposed, and the construction and the experimental results are also described for the characteristics of newly developed three-degrees-of-freedom mechanism. This mechanism comprises three wedge-shaped plates and six multi-layered piezoelectric actuators. The mechanism which requires neither guide plane nor lubrication enables it to move without any friction, wear and badklash. The maximum movements of the stage were 3 μm in X-direction, 12μm in Z-direction and 12 second of arc in β-direction. The positioning resolutions in the translational and rotational directions were less than 0.01μm and 0.01 second of arc, respectively. The loading capacity was 400N. The positioning errors and the motion error were less than ±0.01μm and ±0.03 second of arc. 1 μm step positioning in X-direction interfered with other directions transiently because of difference of the contraction and expansion velocities of the piezoelectric actuators.