Curved waveguides in silicon written by a shaped laser beam
Curved waveguides in silicon written by a shaped laser beam
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DOI：
10.1364/oe.419074
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发表时间：
2021-05-10
期刊：
影响因子：
3.8
通讯作者：
Lei, Shuting
中科院分区：
文献类型：
--
作者：
Wang, Xinya;Yu, Xiaoming;Lei, Shuting
我们首次在单晶硅中实现了曲线半径从2 mm到6 cm的弯曲光波导直写。测量了弯曲光波导的弯曲损耗，与理论值吻合较好。拉曼光谱测量表明，在激光修饰区域形成了不均匀的非晶相和多晶相。这种直接激光写入方法可以提高集成3D硅光子器件的制造能力。(C)OSA开放获取出版协议条款下的2021年美国光学学会
We demonstrate, for the first time, the direct writing of curved optical waveguides in monocrystalline silicon with curve radii from 2 mm to 6 cm. The bending loss of the curved waveguides is measured and a good agreement with theoretical values is found. Raman spectroscopy measurements suggest the formation of inhomogeneous amorphous and polycrystalline phases in the laser-modified region. This direct laser-writing method may advance fabrication capabilities for integrated 3D silicon photonic devices. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement