Production and control of large diameter surface wave plasmas
Production and control of large diameter surface wave plasmas
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DOI：
10.1088/0963-0252/7/2/017
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发表时间：
1998-05
影响因子：
3.8
通讯作者：
M. Nagatsu;I. Ghanashev;H. Sugai
中科院分区：
文献类型：
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作者：
M. Nagatsu;I. Ghanashev;H. Sugai
在直径为22 cm的圆柱形铝放电室内，利用小槽天线产生了平面圆柱形等离子体。将功率为0.2 ~ 2.0 kW的2.45 GHz微波通过石英窗送入充满氩气或压力为几mTorr ~ 1 Torr的放电室。在相对较高的压力下，在石英窗下方观察到有趣的光发射模式和微波场强度，即1 Torr和0.3 Torr下的TM模式。从理论分析来看，这些模式可归因于大平面圆柱形等离子体中激发的表面波。表面波等离子体充满低压氩或气体，比如10mtorr，也被研究用于蚀刻应用。此外，我们还利用脉冲调制微波源进行了等离子体参数和微波场强度的时间和空间分辨测量，以研究表面波等离子体中的功率吸收机制，并演示了脉冲调制表面波等离子体。初步结果还表明，在施加微波脉冲后，在石英窗口（mm）附近存在波长较短的电场强度波动，可以认为是模式转换的电子等离子体波。最后，简要介绍了最小化介电窗口的最新结果。
A planar cylindrical plasma has been produced using small slot antennas in an aluminum discharge chamber with a cylindrical section with a diameter of 22 cm. The 2.45 GHz microwave with a power of 0.2-2.0 kW was fed through a quartz window into the discharge chamber filled with Ar or at a pressure of a few mTorr to 1 Torr. At relatively high pressures, interesting mode patterns of optical emission and microwave field intensity, that is, the TM mode at 1 Torr and TM mode at 0.3 Torr, were observed just below a quartz window. From theoretical analysis, these modes are considered to be attributable to the surface waves excited in a large planar cylindrical plasma. Surface wave plasmas filled with a low-pressure Ar or gas, say 10 mTorr, were also studied for the etching application. Furthermore, we have carried out time- and space-resolved measurements of plasma parameters and microwave field intensity using a pulse-modulated microwave source to study the power absorption mechanism in the surface wave plasma and to demonstrate the pulse-modulated surface wave plasma. Preliminary results also show that short-wavelength fluctuations in the electric field intensity, which might be considered as mode-converted electron plasma waves, exist near the quartz window mm) for 5-10 s after the microwave pulse was applied. Lastly, a recent result of minimizing a dielectric window is briefly presented.