Formation of Dip Structure of Electron Energy Distribution Function in Diffused Nitrogen Plasmas
Formation of Dip Structure of Electron Energy Distribution Function in Diffused Nitrogen Plasmas
复制标题
扩散氮等离子体中电子能量分布函数倾斜结构的形成
DOI：
10.1143/jpsj.67.3443
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发表时间：
1998
影响因子：
1.7
通讯作者：
K. Ohe
中科院分区：
文献类型：
--
作者：
T. Kimura;Masatoshi Nakamura;K. Ohe
用朗缪尔探针测量了直流放电产生的低压扩散氮等离子体中电子能量分布函数（EEDF）的空间依赖性。在低于10 mTorr的压力下测量的EEDF在约3 eV处具有由于电子向壁扩散期间的振动激发碰撞而引起的凹陷结构。浸渍的深度取决于与等离子体源的距离和压力。简化的一维模型，其中的电子扩散通量的空间变化是平衡的，由于非弹性碰撞的电子的去除和引入，可以预测的EEDF的空间依赖性。
Spatial dependence of the electron energy distribution function (EEDF) in low-pressure diffused nitrogen plasmas produced by DC discharge is measured by a Langmuir probe. The EEDF measured at pressures below 10 mTorr has a dip structure at about 3 eV due to vibrational excitation collisions during electron diffusion towards the wall. The depth of the dip depends on both the distance from the plasma source and the pressure. The simplified one-dimensional model, in which the spatial variation in the electron diffusion flux is balanced to the remove and introduction of electrons due to inelastic collisions, can predict the spatial dependences of the EEDF.