Yasushi Inoue: "Synthesis of Sn-Doped a-C : H Films by RF Plasma-Enhanced Chemical Vapor Deposition and Their Properties" Thin Solid Films. 322. 41-45 (1998)

Yasushi Inoue: "Synthesis of Sn-Doped a-C : H Films by RF Plasma-Enhanced Chemical Vapor Deposition and Their Properties" Thin Solid Films. 322. 41-45 (1998)
复制标题

Yasushi Inoue:“通过射频等离子体增强化学气相沉积合成 Sn-Doped a-C : H 薄膜及其性能”固体薄膜。

DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
--
中科院分区:
--
文献类型:
--
作者:

文献摘要

相似文献