Spectral characterization of EUV radiation emitted from a laser-irradiated gas puff target
Spectral characterization of EUV radiation emitted from a laser-irradiated gas puff target
复制标题
激光照射气体吹散目标发出的 EUV 辐射的光谱特征
DOI：
10.1016/s0030-4018(01)01639-x
复制
发表时间：
2001
影响因子：
2.4
通讯作者：
K. Mann
中科院分区：
文献类型：
--
作者：
S. Kranzusch;K. Mann
描述了一种激光等离子体EUV光源，该光源将用于在11至13 nm波长范围内表征EUV光学元件和传感器件。通过将Nd：YAG激光聚焦到双流喷气靶中产生EUV辐射。通过使用不同的目标气体，可以获得宽带以及窄带EUV辐射。辐射的发射特性通过不同的诊断工具进行监测，包括针孔相机，EUV光谱仪和各种EUV光电二极管，直接或在多层反射镜反射后。碰撞引起的能量转移的理论计算给出，以解释所观察到的高度的电子激发在利用的目标气体。
A laser-plasma EUV source is described, which is going to be utilized for characterization of EUV optical components and sensoric devices in the wavelength region from 11 to 13 nm. EUV radiation is generated by focusing a Nd:YAG laser into a double stream gas puff target. By the use of different target gases, broadband as well as narrow-band EUV radiation can be obtained. The emission characteristics of the radiation is monitored by the help of different diagnostic tools including a pinhole camera, an EUV spectrometer, and various EUV photodiodes, either directly or after reflection from multilayer mirrors. Theoretical calculations of collision-induced energy transfer are given in order to explain the observed high degree of electronic excitation in the utilized target gases.