A switching gain scheduled approach for wafer transfer robots and its experimental evaluations
A switching gain scheduled approach for wafer transfer robots and its experimental evaluations
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DOI：
10.1109/acc.2006.1657327
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发表时间：
2006-06
期刊：
影响因子：
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通讯作者：
S. Oh-hara;K. Hirata;Y. Ohta
中科院分区：
文献类型：
--
作者：
S. Oh-hara;K. Hirata;Y. Ohta
本文研究了晶圆传输机器人的控制问题。这些机器人用于半导体制造中转移硅晶片。为了提高半导体的生产率，要求晶圆传送机器人的控制系统实现高速传送和高精度定位。然而，由于机器人具有非线性特性和物理约束，很难设计出能达到这种性能的控制器。本文提出了一种简单的机器人增益调度控制设计方法。增益调度被认为是一种有效的非线性系统控制技术。此外，为了获得良好的性能，我们采用开关控制技术。我们通过仿真和实验来评估其有效性
This paper considers the control of wafer transfer robots. The robots are used for transferring silicon wafers in semiconductors manufacturing. In order to advance the productivity of semiconductors, the control systems for wafer transfer robots are required to achieve high-speed transfer and highly accurate positioning. However, it is difficult to design the controllers which achieve such performance because the robots have nonlinear properties and physical constraints. In this paper, we present a simple gain scheduled control design method for robots. The gain scheduling is known as an effective control technique for nonlinear systems. Furthermore, in order to obtain good performance, we apply switching control technique. We evaluate the effectiveness through simulations and experiments