Electrostatic spring effect on the dynamic performance of microresonators
Electrostatic spring effect on the dynamic performance of microresonators
复制标题
静电弹簧对微谐振器动态性能的影响
DOI：
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发表时间：
2000
期刊：
影响因子：
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通讯作者：
V. Logeeswaran
中科院分区：
文献类型：
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作者：
E. Tay;R. Kumaran;B. Chua;V. Logeeswaran
本文报道了折叠梁微谐振器的谐振频率的分析和实验之间的显着差异。共振频率的实验结果表明，一致的20%的理论和有限元结果的差异。从锥形横截面的弯曲梁，尺寸变化和静电弹簧效应的差异的可能原因进行了讨论，并示出的分析和实验值之间的显着差异。用IntelliCAD软件进行了静电仿真，分离出静电弹簧效应，并与实验结果进行了比较。在DRIE谐振器中也观察到由于AC电压引起的顺应性。
This paper reports on the significant discrepancy between the analytical and experimental resonant frequencies of folded beam micro resonators. Experimental results for the resonant frequency showed a consistent 20% discrepancy over theoretical and finite element results. Possible causes of the discrepancy from tapered cross section of the flexure beams, dimensional variations and electrostatic spring effects are discussed and shown to contribute to the significant difference between analytical and experimental values. IntelliCAD electrostatic simulation was done to isolate the electrostatic spring effect and compared with the experimental observations. The compliance due to AC voltage has also been observed in DRIE resonators.