Experimental and Theoretical Determination of Electron Energy Distribution Functions in Surface Wave Plasmas
Experimental and Theoretical Determination of Electron Energy Distribution Functions in Surface Wave Plasmas
复制标题
表面波等离子体中电子能量分布函数的实验和理论测定
DOI：
10.1007/978-1-4899-1130-8_20
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发表时间：
1993
期刊：
影响因子：
--
通讯作者：
U. Kortshagen
中科院分区：
文献类型：
--
作者：
U. Kortshagen
众所周知，RF和微波放电的详细建模需要电子能量分布函数（EEDF）的知识，因为它决定了等离子体的传输特性以及原子过程的速率。不幸的是，EEDF经常远离麦克斯韦，特别是对于低电离度的等离子体。事实上，EEDF反映了等离子体中的原子过程，因此必须针对每种类型的气体和每种实验情况具体确定。
It is well-known that the detailed modelling of RF and microwave discharges requires the knowledge of the electron energy distribution function (EEDF), since it determines the transport properties of the plasma as well as the rates of atomic processes. Unfortunately the EEDF is frequently far away from being a Maxwellian, in particular for plasmas with a low degree of ionization. In fact the EEDF mirrors the atomic processes within the plasma and thus has to be determined specifically for every type of gas and every experimental situation.