Laser Ablation Dynamics of Amorphous Film of a Cu-Phthalocyanine Derivative
Laser Ablation Dynamics of Amorphous Film of a Cu-Phthalocyanine Derivative
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铜酞菁衍生物非晶态薄膜的激光烧蚀动力学
DOI：
10.2184/lsj.25.306
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发表时间：
1997
期刊：
影响因子：
--
通讯作者：
S. Kawanishi
中科院分区：
文献类型：
--
作者：
M. Hosoda;H. Furutani;H. Fukumura;H. Masuhara;M. Nishii;N. Ichinose;S. Kawanishi
采用纳秒干涉、纳秒照相、空间分辨和时间分辨吸收光谱以及原子力显微镜（AFM）等技术研究了酞菁铜衍生物非晶薄膜的激光烧蚀动力学。在140 mJ/cm ~ 2时，薄膜的刻蚀开始于准分子激光脉冲的前半部分，随后是气态化合物的喷射。由于喷射材料的吸收光谱与非晶膜的吸收光谱相似，因此喷射材料的主要分子种类是Cu-酞菁衍生物，这意味着即使在激光烧蚀时也没有分解。结果表明，这种烧蚀是由光热机制引起的。用原子力显微镜（AFM）观察到，喷射材料粘附的PMMA薄膜表面结构布满了最小尺寸约为120 nm的凸起。结果表明，铜酞菁衍生物在激光烧蚀过程中不是以单分子形式喷射，而是以亚微米颗粒形式喷射。
Laser ablation dynamics of amorphous film of a Cu-phthalocyanine derivative was studied by using nanosecond interferometry, nanosecond photography, space- and time-resolved absorption spectroscopy, and atomic force microscope (AFM). At 140mJ/cm2, etching of the film was found to begin at the early half of an excimer laser pulse followed by the ejection of gaseous compounds. Since the absorption spectrum of ejected materials was similar to that of the amorphous film, main molecular specie of the ejected materials is the Cu-phthalocyanine derivative, meaning no decomposition even upon laser ablation. It is suggested that photothermal mechanism is responsible for the ablation. It was observed with AFM that surface structure of the PMMA film adhered with ejected materials was covered with humps whose minimum dimension was about 120nm. It is suggested that Cu-phthalocyanine derivative was ejected not as single molecules but as submicron particles upon laser ablation.