A MEMS Bistable Device With Push-On-Push-Off Capability
A MEMS Bistable Device With Push-On-Push-Off Capability
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DOI：
10.1109/jmems.2012.2228165
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发表时间：
2013-02-01
影响因子：
2.7
通讯作者：
Yang, Yao-Joe
中科院分区：
文献类型：
--
作者：
Huang, Hen-Wei;Yang, Yao-Joe
这封信提出了一种新的MEMS双稳态器件，它只需要一个独立的驱动源在两个稳定状态之间切换。所提出的装置采用由两个弯曲梁结构组成的机械推上推下机构。采用集成v梁作动器（VBA）作为唯一的作动元件。该器件采用电感耦合等离子体（ICP）蚀刻工艺，可在绝缘体上的硅晶圆上实现。初步测量结果表明，施加在VBA上的30ms 7.2 V脉冲可以将器件从OFF状态驱动到ON状态，而施加50ms 7.2 V脉冲可以将器件从ON状态释放回OFF状态。还提供了用测振仪测量的瞬态位移结果。
This letter presents a novel MEMS bistable device that requires only one independent driving source for switching between its two stable states. The proposed device employs a mechanically push-on-push-off mechanism consisting of two curved beam structures. An integrated V-beam actuator (VBA) is used as the only actuation component. The proposed device can be easily realized on a silicon-on-insulator wafer by using the inductively coupled plasma (ICP) etching process with a single photomask. Preliminary measurement results show that a 30-ms pulse of 7.2 V applied to the VBA can drive the device from the OFF state to the ON state, and a 50-ms pulse of 7.2 V can release the device from the ON state back to the OFF state. Transient displacement results measured by using a vibrometer are also provided.