Direct Imprinting of Porous Substrates: A Rapid and Low-Cost Approach for Patterning Porous Nanomaterials
Direct Imprinting of Porous Substrates: A Rapid and Low-Cost Approach for Patterning Porous Nanomaterials
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DOI：
10.1021/nl1028073
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发表时间：
2011-05-01
期刊：
影响因子：
10.8
通讯作者：
Weiss, S. M.
中科院分区：
文献类型：
--
作者：
Ryckman, Judson D.;Liscidini, Marco;Weiss, S. M.
这项工作描述了一种一步，多孔纳米材料的直接图像化技术，包括绝缘体，半导体和金属，而不需要中间聚合物加工或干蚀刻步骤。我们的工艺，我们称之为“多孔基板的直接压印（DIPS）”，利用具有微纳米级特征的可重复使用的印章，直接应用于多孔材料，以选择性地压缩或粉碎多孔网络。印花图案以高保真度，垂直分辨率低于5 nm，横向分辨率低于100 nm转移到多孔材料上。该过程在室温和标准大气压下不到一分钟即可完成。我们已经展示了从亚波长光学元件到微粒子的结构，并为包括表面增强拉曼光谱（SERS）、无标签生物传感器和药物输送在内的应用提供了令人兴奋的途径。
This work describes a technique for one-step, direct patterning of porous nanomaterials, including insulators, semiconductors, and metals without the need for intermediate polymer processing or dry etching steps. Our process, which we call "direct imprinting of porous substrates (DIPS)", utilizes reusable stamps with micro- and nanoscale features that are applied directly to a porous material to selectively compress or crush the porous network. The stamp pattern is transferred to the porous material with high fidelity, vertical resolution below 5 nm, and lateral resolution below 100 nm. The process is performed in less than one minute at room temperature and at standard atmospheric pressure. We have demonstrated structures ranging from subwavelength optical components to micropartides and present exciting avenues for applications including surface-enhanced Raman spectroscopy (SERS), label-free biosensors, and drug delivery.