Wideband two-port beam splitter of a binary fused-silica phase grating.
Wideband two-port beam splitter of a binary fused-silica phase grating.
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DOI：
10.1364/ao.47.004004
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发表时间：
2008-08
期刊：
影响因子：
1.9
通讯作者：
Bo Wang;Changhe Zhou;Jijun Feng;H. Ru;Jiangjun Zheng
中科院分区：
文献类型：
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作者：
Bo Wang;Changhe Zhou;Jijun Feng;H. Ru;Jiangjun Zheng
通常的宽带光谱多层镀膜薄膜分束器不容易实现。我们描述了基于二元熔融石英相位光栅的宽带传输双端口分束器的实现。为了在 0 级和 -1 级衍射中实现高效率和平等，在 1550 nm 波长下使用严格的耦合波分析来优化光栅轮廓参数。采用全息记录和电感耦合等离子体干法刻蚀技术来制造熔融石英分束光栅。使用利特罗安装下制造的光栅可以获得 (45% x 2) = 90% 衍射到两个级的测量效率。这种宽带二端口分束光栅的物理机制可以通过基于入射波激发模式的两光束干涉的模态方法得到很好的解释。凭借高损伤阈值、低热膨胀系数和宽带高效率，所提出的熔融石英蚀刻分束器应该成为各种实际应用的有用光学元件。
The usual beam splitter of multilayer-coated film with a wideband spectrum is not easy to achieve. We describe the realization of a wideband transmission two-port beam splitter based on a binary fused-silica phase grating. To achieve high efficiency and equality in the diffracted 0th and -1st orders, the grating profile parameters are optimized using rigorous coupled-wave analysis at a wavelength of 1550 nm. Holographic recording and the inductively coupled plasma dry etching technique are used to fabricate the fused-silica beam splitter grating. The measured efficiency of (45% x 2) = 90% diffracted into the both orders can be obtained with the fabricated grating under Littrow mounting. The physical mechanism of such a wideband two-port beam splitter grating can be well explained by the modal method based on two-beam interference of the modes excited by the incident wave. With the high damage threshold, low coefficient of thermal expansion, and wideband high efficiency, the presented beam splitter etched in fused silica should be a useful optical element for a variety of practical applications.