Prism-assisted inclined UV lithography for 3D microstructure fabrication
Prism-assisted inclined UV lithography for 3D microstructure fabrication
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DOI：
10.1088/0960-1317/22/8/085022
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发表时间：
2012-07
影响因子：
2.3
通讯作者：
G. Jiang;S. Baig;Michael R. Wang
中科院分区：
文献类型：
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作者：
G. Jiang;S. Baig;Michael R. Wang
引入棱镜辅助倾斜紫外（UV）光刻技术来制造三维（3D）微结构。 SU-8 光刻胶的曝光角度范围为 0° 至 60° 的倾斜结构无需浸入折射率匹配液体中即可轻松实现。多向倾斜结构的制造过程可以通过使用具有多向侧面的棱镜进行一步式紫外曝光来简化。我们的实验中使用了角棱镜和锥形棱镜来演示这一概念。倒置三脚架结构和喇叭结构已通过一步曝光制作完成。对作为一步曝光关键参数之一的有效曝光面积进行了实际应用分析。介绍了通过该方法制造的各种 3D 微结构的示例。
A prism-assisted inclined ultraviolet (UV) lithography technique is introduced for the fabrication of three-dimensional (3D) microstructures. Slanted structures with exposure angles ranging from 0° to 60° in SU-8 photoresist have been easily achieved without immersion in the index matching liquid. The fabrication process of multidirectional slanted structures can be simplified by one-step UV exposure using a prism with multidirectional side surfaces. A corner prism and a cone prism have been used in our experiment to demonstrate this concept. Upside-down tripod structures and horn structures have been fabricated in one-step exposures. The effective exposure area as one key parameter of the one-step exposure is analyzed for practical applications. Examples of various 3D microstructures fabricated by this method are presented.