A system for vector measurement of aerodynamic wall shear stress
A system for vector measurement of aerodynamic wall shear stress
复制标题
气动壁面剪应力矢量测量系统
DOI：
--
复制
发表时间：
2017
期刊：
影响因子：
--
通讯作者：
M. Sheplak
中科院分区：
文献类型：
--
作者：
C. Barnard;D. Mills;M. Sheplak
本文介绍了一种用于气动壁面剪应力矢量测量的传感器系统。微机电系统（MEMS）的原型利用一个蛇形系绳弯曲双轴平面内运动。耦合到多频调制/解调系统的电容性间隙对允许跨两个轴的独立换能。传感器性能包括0.16 mV/Pa的平均动态/平均剪切应力灵敏度，对应于1.128 kHz下0.3 mPa的最小可检测信号。压力抑制校准为74 dB，面内交叉轴隔离超过24 dB。
This paper describes a sensor system designed for vector measurement of aerodynamic wall shear stress. The microelectromechanical systems (MEMS) prototype utilizes a serpentine tether flexure for dual-axis in-plane motion. Capacitive gap pairs coupled to a multi-frequency modulation/demodulation system allow for independent transduction across both axes. Sensor performance includes an average dynamic/mean shear stress sensitivity of 0.16 mV/Pa, corresponding to a minimum detectable signal of 0.3 mPa at 1.128 kHz. Pressure rejection is calibrated at 74 dB, with in-plane cross-axis isolation in excess of 24 dB.