Enhancement of pulsed laser removal of metal oxides by electrochemical control
Enhancement of pulsed laser removal of metal oxides by electrochemical control
复制标题
通过电化学控制增强脉冲激光去除金属氧化物
DOI：
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发表时间：
1996
期刊：
影响因子：
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通讯作者：
O. Kerrec
中科院分区：
文献类型：
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作者：
O. Yavaş;R. Oltra;O. Kerrec
在适当的电压条件下，脉冲激光辐照电解槽中的氧化金属表面是一种有效去除氧化膜的新方法。通过对模拟腐蚀产物膜的光学反射谱和能谱的系统测量，研究了这一新现象的物理机制、观察的物理条件和可能的共性。观察到，在激光照射之前使用碱性电解液和施加一定的阴极电位是获得高去除效率的基本要求。这项新技术在冶金、半导体制造技术和核电计划的去污方面具有潜在的应用前景，并适用于氧化表面的无掩膜图案化。
Pulsed laser irradiation of oxidized metallic surfaces in an electrolytic cell under proper voltage conditions is demonstrated to be a promising new approach for effective removal of oxide films. Systematic measurements on simulated corrosion-product films by optical reflectance profile and energy dispersive X-ray spectroscopy are used to study the physical mechanisms of this novel phenomenon, the physical conditions for its observation and its possible generality. It was observed that the utilization of a basic electrolyte solution and the imposition of a certain cathodic potential prior to laser irradiation is an essential requirement for a high removal efficiency. This new technique has potential applications in metallurgy, semiconductor fabrication technology and decontamination of nuclear power plans and is suitable for maskless patterning of oxidized surfaces.