Decoupling Control by the Center of Rotation and Gravity Hybrid-Driven Method for High-Precision Scan Stage with Multiple Actuators
Decoupling Control by the Center of Rotation and Gravity Hybrid-Driven Method for High-Precision Scan Stage with Multiple Actuators
复制标题
多驱动器高精度扫描台旋转中心与重力混合驱动解耦控制
DOI：
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发表时间：
2016
期刊：
影响因子：
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通讯作者：
Wataru Ohnishi
中科院分区：
文献类型：
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作者：
Wataru Ohnishi;Hiroshi Fujimoto;Pai-Hsueh Yang;Ping-Wei Chang;Bausan Yuan;Koichi Sakata;Atsushi Hara;Wataru Ohnishi
