A CMOS humidity sensor with on-chip calibration
A CMOS humidity sensor with on-chip calibration
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DOI：
10.1016/s0924-4247(01)00543-x
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发表时间：
2001-08-01
影响因子：
4.6
通讯作者：
Franca, JE
中科院分区：
文献类型：
--
作者：
Qiu, YY;Azeredo-Leme, C;Franca, JE
本文介绍了一种带片上校准电路的电容式湿度传感器，该传感器采用标准的CMOS工艺，可以实现高性价比的湿度测量。在标准的cmos制造之后，通过后处理步骤获得芯片上的湿度传感特性，从而在封装的芯片上沉积商用聚酰亚胺。该传感器的传感原理是沉积的聚酰亚胺的介电常数因水的吸收/解吸而发生变化。片上校准电路基于开关电容前端，具有高线性度、对温度不敏感以及低功耗的特点。测试结果表明，该集成电路可对传感器的偏移量和灵敏度进行精确标定，并提供可读的输出。该传感器与相对湿度在10-90%相对湿度范围内呈线性关系，滞后可忽略不计。(C)2001 Elsevier Science B.V.保留所有权利。
This paper describes a capacitive humidity sensor with on-chip calibration circuit fabricated by a standard CMOS process to achieve a cost-effective solution for accurate and reliable humidity measurement. The humidity sensing property on-chip is obtained by a postprocessing step after the standard CMOS fabrication and whereby a commercial polyimide is deposited on the packaged chip. The sensing principle of the sensor is the dielectric constant change of deposited polyimide due to absorption/desorption of water. The on-chip calibration circuit is based on a switched-capacitor front-end, featuring high linearity, insensitivity to temperature, as well as low power consumption. The measured results show that the offset and the sensitivity of the sensor can be precisely calibrated by the integrated circuit which also provides a readable output. The sensor has a linear function with relative humidity in the range of 10-90% RH and a negligible hysteresis. (C) 2001 Elsevier Science B.V. All rights reserved.