Laser annealing of shape memory alloys : A versatile tool for developing smart micro-devices
Laser annealing of shape memory alloys : A versatile tool for developing smart micro-devices
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形状记忆合金激光退火：开发智能微型设备的多功能工具
DOI：
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发表时间：
2001
期刊：
影响因子：
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通讯作者：
R. Gotthardt
中科院分区：
文献类型：
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作者：
Y. Bellouard;T. Lehnert;R. Clavel;T. Sidler;R. Gotthardt
从形状变化的角度来看，形状记忆效应本质上是不可逆的。因此，开发形状记忆合金（SMA）致动器，即产生运动的装置，需要合适的方法来绕过该固有特性。自从发现形状记忆效应以来，已经研究了不同的方法，无论是像《双向形状记忆效应》这样的内在方法还是像使用偏置元件这样的外在方法。本文提出了一种基于材料局部退火的新方法。激光用于局部结晶非晶薄膜或再结晶SMA材料的冷加工片材。例如，这种方法允许开发由单片材料制成的高度集成的微型设备。的基本原理，一个典型的设置和激光退火对材料性能的一些影响，其次是一些单片微器件的例子，使用这一概念。
From a shape change point of view, the shape memory effect is not intrinsically reversible. Therefore developing Shape Memory Alloys (SMA) actuators, i.e. devices producing a motion, requires a suitable method to bypass this intrinsic property. Since the shape memory effect discovery, different methods, either intrinsic like the «Two-Way Shape Memory Effect » or extrinsic like the use of a biasing element have been investigated. In this paper, a new method based on a local annealing of the material is presented. A laser is used to locally crystallise amorphous thin film or re-crystallise cold-wofked sheet of SMA material. For instance, this method allows the development of highly integrated micro-devices made out of one single piece of material. The basic principle, a typical setup and some effects of the laser annealing on the material properties are presented followed by some examples of monolithic micro-devices developed using this concept.