High power single mode 980nm DBR tapered diode lasers with integrated sixth order surface gratings based on simplified fabrication process
High power single mode 980nm DBR tapered diode lasers with integrated sixth order surface gratings based on simplified fabrication process
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DOI：
10.1117/12.662698
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发表时间：
2006-04
期刊：
影响因子：
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通讯作者：
K. Paschke;J. Behrendt;M. Maiwald;J. Fricke;H. Wenzel;G. Erbert
中科院分区：
文献类型：
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作者：
K. Paschke;J. Behrendt;M. Maiwald;J. Fricke;H. Wenzel;G. Erbert
本文报道了采用晶圆步进光刻和反应离子刻蚀同时制备具有六阶表面光栅和脊波导的分布式布拉格反射器锥形激光器。在准连续波工作下，获得了978 nm处的单纵模发射和4.4 W处的光束传播比M2 = 1.1。在连续波工作中，最大输出功率为2.5 W，旁模抑制比大于20 dB，中央瓣的波束传播比M2 < 1.4。
We report on distributed Bragg reflector tapered lasers having 6th order surface gratings and ridge waveguides simultaneously fabricated by wafer stepper lithography and reactive ion etching. Single longitudinal mode emission at 978 nm and a beam propagation ratio of M2 = 1.1 at 4.4 W have been obtained in quasi-continuous wave operation. In CW operation, a maximal output power of 2.5 W with a side-mode suppression ratio of more than 20 dB and a beam propagation ratio of M2 < 1.4 for the central lobe has been achieved.