Crack-free highly reflective AlInN /AlGaN Bragg mirrors for UV applications
Crack-free highly reflective AlInN /AlGaN Bragg mirrors for UV applications
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DOI：
10.1063/1.2167399
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发表时间：
2006-01
影响因子：
4
通讯作者：
E. Feltin;J. Carlin;J. Dorsaz;G. Christmann;R. Butté;M. Laügt;M. Ilegems;N. Grandjean
中科院分区：
文献类型：
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作者：
E. Feltin;J. Carlin;J. Dorsaz;G. Christmann;R. Butté;M. Laügt;M. Ilegems;N. Grandjean
报道了利用Al0.85In0.15N/Al0.2Ga0.8N晶格匹配系统在紫外区生长高反射分布布拉格反射器(DBR)。DBR被沉积在几乎无应变的Al0.2Ga0.8N模板上，以避免应变引起的结构退化。然后，裂缝的出现被完全抑制。在波长为∼340 nm、阻带宽度为215 meV(20 Nm)的情况下，DBR的反射率大于99%。
We report the growth of highly reflective distributed Bragg reflectors (DBRs) in the UV region using the Al0.85In0.15N∕Al0.2Ga0.8N lattice-matched system. The DBRs were deposited on nearly strain-free Al0.2Ga0.8N templates to avoid strain-induced structural degradations. The appearance of cracks was then completely suppressed. The DBRs exhibit a reflectivity higher than 99% at a wavelength as short as ∼340nm and a stop band width of 215meV (20nm).