Data Analytics Enables Significant Improvement of Robustness in Chemical Vapor Deposition of Carbon Nanotubes Based on Vacuum Baking
Data Analytics Enables Significant Improvement of Robustness in Chemical Vapor Deposition of Carbon Nanotubes Based on Vacuum Baking
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DOI：
10.1021/acs.iecr.9b01725
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发表时间：
2019-06
影响因子：
4.2
通讯作者：
Jaegeun Lee;Moataz Abdulhafez;M. Bedewy
中科院分区：
文献类型：
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作者：
Jaegeun Lee;Moataz Abdulhafez;M. Bedewy
化学气相沉积法合成垂直排列碳纳米管（VACNTs）的运行差异的根本原因可归因于该工艺对反应器中少量不受控制/未测量的气体种类的敏感性。因此，需要普遍适用的处理步骤来确保一致性。在这里，我们定量地测试了各种处理启发式在减少增长变异性方面的有效性。对11种不同配方生长的95个VACNT样品的统计分析表明，在催化剂形成之前，在200°C下轻度烘烤的泵送导致森林高度变异系数显著降低（6倍）。相比之下，其他处理步骤，如不加热的真空泵和在催化剂形成过程中调整He与H2的比例，对生长变异性没有显著影响；我们不能在任何合理的显著性水平上拒绝原假设。原子力显微镜分析表明……
The root causes underlying run-to-run variations in the synthesis of vertically aligned carbon nanotubes (VACNTs) by chemical vapor deposition can be attributed to the sensitivity of the process to small uncontrolled/unmeasured quantities of gaseous species in the reactor. Hence, universally applicable processing steps are needed to ensure consistency. Here, we quantitatively test the effectiveness of various processing heuristics in reducing growth variability. Statistical analysis of 95 VACNT samples grown by 11 different recipes demonstrated that pumping with mild baking at 200 °C prior to catalyst formation resulted in a significantly reduced coefficient of variation of forest heights (by a factor of 6). In contrast, other processing steps such as vacuum pumping without heating and adjusting the He to H2 ratio during catalyst formation did not significantly affect growth variability; we could not reject the null hypothesis at any reasonable level of significance. Atomic force microscopy analyses sugge...