Production of large-diameter plasma using multi-slotted planar antenna
Production of large-diameter plasma using multi-slotted planar antenna
复制标题
利用多槽平面天线生产大直径等离子体
DOI：
10.1088/0963-0252/8/4/302
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发表时间：
1999
期刊：
影响因子：
--
通讯作者：
T. Morimoto
中科院分区：
文献类型：
--
作者：
Y. Yasaka;D. Nozaki;K. Koga;M. Ando;Tetsuya Yamamoto;N. Goto;N. Ishii;T. Morimoto
报道了利用多缝平面天线（MSP）进行微波放电，获得大直径均匀等离子体的实验研究。MSP天线从大量的槽辐射微波场，以便在外半径中形成场的均匀径向分布。对于5-10 mTorr的Ar压力和1-3 kW的微波功率，在30 cm直径上产生了具有±3-4%均匀性的离子饱和电流的过密等离子体。高密度等离子体的有效产生可能是由于斜入射的微波场在等离子体共振处的增强。
It is reported that a large-diameter uniform plasma is obtained by microwave discharges using multi-slotted planar (MSP) antenna. The MSP antenna radiates the microwave field from a large number of slots so as to form a uniform radial distribution of the field in the outer radii. Overdense plasmas are produced with ±3-4% uniformity of the ion saturation current over a 30 cm diameter for Ar pressures of 5-10 mTorr and microwave powers of 1-3 kW. The efficient production of overdense plasmas may be due to the enhancement of the microwave field of oblique incidence at the plasma resonance.