Complex optical elements for scanning helium microscopy through 3D printing
Complex optical elements for scanning helium microscopy through 3D printing
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DOI：
10.1088/1361-6463/ac3a3e
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发表时间：
2022-03-03
影响因子：
3.4
通讯作者：
Dastoor, P. C.
中科院分区：
文献类型：
--
作者：
Bergin, M.;Myles, T. A.;Dastoor, P. C.
开发下一代扫描氦显微镜需要制造具有复杂内部几何结构的光学元件。我们表明，树脂立体平版印刷(SLA)3D打印生产的低成本组件具有必要的卷曲结构，同时实现了所需的真空性能，即使不进行现场烘焙。以现有扫描氦显微镜的针孔板光学元件为例，采用SLA 3D打印技术对其进行了加工。与原来的加工元件相比，新的光学元件最大限度地减少了背景信号的关键来源，特别是多次散射和二次出射光束。
Developing the next generation of scanning helium microscopes requires the fabrication of optical elements with complex internal geometries. We show that resin stereolithography (SLA) 3D printing produces low-cost components with the requisite convoluted structures whilst achieving the required vacuum properties, even without in situ baking. As a case study, a redesigned pinhole plate optical element of an existing scanning helium microscope was fabricated using SLA 3D printing. In comparison to the original machined component, the new optical element minimised the key sources of background signal, in particular multiple scattering and the secondary effusive beam.