Application of Reliability-Based Topology Optimization for Microelectromechanical Systems
Application of Reliability-Based Topology Optimization for Microelectromechanical Systems
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DOI：
10.2514/1.28508
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发表时间：
2007-12
期刊：
影响因子：
2.5
通讯作者：
Chwail Kim;Semyun Wang;Il-Han Hwang;Jong-Hyun Lee
中科院分区：
文献类型：
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作者：
Chwail Kim;Semyun Wang;Il-Han Hwang;Jong-Hyun Lee
在基于可靠性的设计优化中，约束考虑了关键事件满足/失败的概率。最近，基于可靠性的设计优化被应用到拓扑优化中，导致了基于可靠性的拓扑优化的发展。虽然基于可靠性的拓扑优化是一种有用和有意义的方法，但它需要大量的计算资源。因此，本研究提出了一种基于响应面方法的并行可靠性拓扑优化方法。文中证明，该方法大大降低了基于可靠性的拓扑优化的计算量。然后将所提出的方法应用于微电子机械系统的设计。具体地说，在微电子机械系统中，由于刻蚀过程中产生的随机性和比例效应，基于可靠性的拓扑优化可以非常有效。该方法成功地设计了新的器件，并通过实验验证了设计的正确性。
In reliability-based design optimization, the constraints consider the probability of the satisfaction/failure of critical events. Lately, reliability-based design optimization has been applied to topology optimization, resulting in the development of reliability-based topology optimization. And though reliability-based topology optimization can be a useful and meaningful method, it requires excessive computational resources. Therefore, this research proposes a parallel-computed reliability-based topology optimization using the response surface method. This paper demonstrates that the proposed method greatly reduces the computation requirement of reliability-based topology optimization. The proposed methodology is then applied to design microelectromechanical systems. Specifically, in microelectromechanical systems, reliability-based topology optimization can be highly effective because of randomness generated during the etching process and scaling effect. The proposed method successfully designs new devices and verifies the designs via experiment.