Characterization of Ar+-ion irradiated alumina coatings

Characterization of Ar+-ion irradiated alumina coatings
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氩离子辐照氧化铝涂层的表征

DOI:
10.1016/0022-3115(85)90247-8
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发表时间:
1985
影响因子:
3.1
通讯作者:
N. Matsunami
N. Matsunami
中科院分区:
工程技术2区
文献类型:
--
作者:
N. Iwamoto;Y. Makino;S. Endo;N. Itoh;N. Matsunami

文献摘要

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采用XPS和ESR技术对等离子喷涂氧化铝涂层进行了Ar+离子辐照前后的表征。两个Olspeak观察到在所有Ar+离子辐照氧化铝涂层。正常α-Al 2 O3中的Ols结合能比Ols结合能高4-5 eV,归属于近一价氧离子。铝离子的部分电荷高于正常α-Al 2 O3中的部分电荷,这归因于近一价氧离子与铝离子的缔合。分别在340 mT和341 mT附近观察到两个共振。在340 mT附近的共振可能起源于空穴俘获的(即,接近单价的)氧离子。在1016和1017 Ar +/cm ~ 2剂量下,薄膜中形成了非晶层。
Characterization of plasma-sprayed alumina coatings before and after Ar+-ion irradiation was performed by XPS and ESR techniques. Two Olspeaks were observed in all Ar+-ion irradiated alumina coatings. The Olspeaks with 4–5 eV higher energy than Olsbinding energy in normal α-Al2O3are assigned of nearly monovalent oxygen ions. Aluminum ions with higher partial charge than one in normal α-Al2O3are attributed to the association of nearly monovalent oxygen ions to aluminum ions. Two resonances were observed near 340 mT and 341 mT, respectively. The resonance near 340 mT may be originated from hole-trapped (that is, nearly monovalent) oxygen ions. Further, the formation of an amorphous layer was suggested at the dose of 1016and 1017Ar+/cm2.