Ultra-precision stage control based on friction model of non-resonant ultrasonic motor
Ultra-precision stage control based on friction model of non-resonant ultrasonic motor
复制标题
基于非谐振超声电机摩擦模型的超精密载物台控制
DOI：
10.1109/amc.2004.1297929
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发表时间：
2004
期刊：
影响因子：
--
通讯作者：
T. Ohmi
中科院分区：
文献类型：
--
作者：
S. Hashimoto;K. Ohishi;T. Ohishi;T. Ishikawa;K. Kosaka;Y. Egashira;H. Kubota;T. Ohmi
提出了一种基于摩擦模型的超精密工作台控制方法。首先，摩擦特性作为载物台位置的函数进行实验评估。其次，将摩擦模型应用于所提出的连续轨迹跟踪控制设计，并通过定位实验验证了基于模型的控制的有效性。最后，通过测量静摩擦特性的时变性，提出了控制系统的在线辨识方法。
This paper presents a friction model-based ultra-precision stage control that introduces the non-resonant ultrasonic motor (NRUSM). At first, the friction characteristic is experimentally evaluated as a function of the stage position. Next, the friction model is adopted for the proposed continuous-pass tracking control design, and then the efficiency of the model-based control is verified by positioning experiments. Finally, measuring the time variation of the static friction characteristics, the on-line identification method for the control system is proposed.