Statistical characteristics of lifetime distribution based on the defect clustering for time-dependent dielectric breakdown in middle- and back-end-of-line
Statistical characteristics of lifetime distribution based on the defect clustering for time-dependent dielectric breakdown in middle- and back-end-of-line
复制标题
基于中后端时变介质击穿缺陷聚类的寿命分布统计特性
DOI：
10.7567/jjap.54.05ec02
复制
发表时间：
2015
影响因子：
1.5
通讯作者：
Shinji Yokogawa
中科院分区：
文献类型：
--
作者：
Yamada S;Koyama Y;Ueguchi T;Shinji Yokogawa
