Measurements of the electron density and temperature in an ion source of the low energy ion beam system

Measurements of the electron density and temperature in an ion source of the low energy ion beam system
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低能离子束系统离子源中电子密度和温度的测量

DOI:
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发表时间:
2014
期刊:
Proc. 8th International Conference on Reactive Plasmas 2014
影响因子:
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通讯作者:
and Haruhisa KOGUCHI
and Haruhisa KOGUCHI
中科院分区:
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文献类型:
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作者:
Akihisa NAKAMIYA;Yutaka FUJIWARA;Hajime SAKAKITA;Yoichi HIRANO;Satoru KIYAMA;and Haruhisa KOGUCHI

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