Planar elliptical solid immersion lens based on a Cartesian oval
Planar elliptical solid immersion lens based on a Cartesian oval
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基于笛卡尔椭圆的平面椭圆固体浸没透镜
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
J. Donegan
中科院分区：
文献类型：
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作者：
D. McCloskey;J. Donegan
我们报告了单元件平面固体浸没透镜的设计，该透镜理论上能够将光限制在半高全宽为 0.29 λ（154 nm，λ = 532 nm）的焦点上，并实现 1.732 的有效数值孔径。使用远场成像技术制造器件并进行初始光学表征，提供 0.7 的数值孔径下限。实验结果与二维有限元方法模拟相比较。设备可以使用紫外光刻技术进行批量生产，并产生比昂贵的显微镜物镜更低的焦体积。
We report on the design of a single element planar solid immersion lens which is theoretically capable of confining light to a focal spot with full width half maximum of 0.29 λ (154 nm at λ = 532 nm) and achieving an effective numerical aperture of 1.732. Devices are fabricated and initial optical characterization is performed using a far-field imaging technique providing a lower bound on the numerical aperture of 0.7. Experimental results compare well with two dimensional finite element method simulations. Devices can be mass produced using ultraviolet lithography and produce focal volumes lower than expensive microscope objectives.
DOI：
10.1073/pnas.1015386107
发表时间：
2010-12-28
影响因子：
11.1
作者：
Wang, Qi Jie;Yan, Changling;Capasso, Federico
通讯作者：
Capasso, Federico