Si-capping-induced surface roughening on the strip structures of Ge selectively grown on an Si substrate

Si-capping-induced surface roughening on the strip structures of Ge selectively grown on an Si substrate
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Si 覆盖导致 Si 衬底上选择性生长的 Ge 带状结构表面粗糙化

DOI:
10.1116/6.0001142
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发表时间:
2021
影响因子:
1.4
通讯作者:
Ishikawa Yasuhiko
Ishikawa Yasuhiko
中科院分区:
工程技术4区
文献类型:
--
作者:
Katamawari Riku;Kawashita Kazuki;Hizawa Takeshi;Ishikawa Yasuhiko

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