High-precision spin coater for a synchrotron radiation in situ GISAXS system: for the investigation of formation mechanisms of self-assembled structures in polymer thin films
High-precision spin coater for a synchrotron radiation in situ GISAXS system: for the investigation of formation mechanisms of self-assembled structures in polymer thin films
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用于同步辐射原位GISAXS系统的高精度旋涂机：用于研究聚合物薄膜中自组装结构的形成机制
DOI：
10.1107/s0021889813024151
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
M. Takata
中科院分区：
文献类型：
--
作者：
H. Ogawa;T. Miyazaki;K. Shimokita;A. Fujiwara;M. Takenaka;T. Yamada;Y. Sugihara;M. Takata
为了研究聚合物薄膜中自组装结构的形成机理，研制了一套高精度的旋涂系统。旋涂机设计为在旋转期间具有小的轴向偏转（在2000 r min−1的最大速度下<2.6 µm），以保持相对于入射X射线束的相对位置，并且高度紧凑（70 mm），以便于并入原位同步辐射掠入射小角度X射线散射（GISAXS）系统。 在2000 r min-1下薄膜形成过程中，以64 ms的时间分辨率同时测量三嵌段共聚物的形态和膜厚度的第一个结果为理解膜表面上垂直生长的层状结构提供了不可或缺的信息。
A high-precision spin-coater system has been developed for the investigation of formation mechanisms of self-assembled structures in polymer thin films. The spin coater was designed to have small axial deflection (<2.6 µm at the maximum speed of 2000 r min−1) during rotation in order to maintain the relative position with respect to the incident X-ray beam, and to be compact (70 mm) in height to facilitate incorporation into an in situ synchrotron radiation grazing-incidence small-angle X-ray scattering (GISAXS) system. The first results of simultaneous measurements on the morphology and film thickness of a triblock copolymer with time resolution of 64 ms during thin-film formation at 2000 r min−1 provide indispensable information for understanding the vertically grown lamellar structure on the film surface.