P6E-4 Glass Substrate Surface Acoustic Wave Linear Motor
P6E-4 Glass Substrate Surface Acoustic Wave Linear Motor
复制标题
P6E-4 玻璃基板表面声波直线电机
DOI:
10.1109/ultsym.2007.641
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发表时间:
2007
期刊:
影响因子:
--
通讯作者:
T. Mizuno
中科院分区:
文献类型:
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作者:
H. Kotani;M. Takasaki;T. Mizuno
A surface acoustic wave (SAW) linear motor is a kind of ultrasonic motor. The advantages of the SAW linear motor are thin structure, high thrust force, high velocity and precise positioning. However, the stator transducer material (piezoelectric material) of the SAW linear motor has constraints of size and shape. To resolve this problem, a method is proposed to excite and propagate a SAW on a non-piezoelectric material surface. Excitation and propagation of the SAW on the non- piezoelectric material is realized by the combination of a LiNbO3 plate and a glass substrate. The design and fabrication of the glass substrate transducer for the SAW linear motor are described. The design employs a novel transducer structure, which has been proposed previously. The glass transducer was applied for the SAW linear motor and the motor was driven successfully. Measurement results of the glass transducer and driving characteristics of the glass substrate SAW linear motor are also reported.
DOI:
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发表时间:
2006
期刊:
Proceedings of the 2006 IEEE International Conference on Mechatronics and Automation
影响因子:
--
作者:
H.Kotani;M.Takasaki;T.Nara;T.Mizuno
通讯作者:
T.Mizuno
DOI:
--
发表时间:
2006
期刊:
Proceedings of IEEE Ultrasonics Symposium
影响因子:
--
作者:
M.Takasaki;H.Kotani;T.Nara;T.Mizuno
通讯作者:
T.Mizuno
DOI:
--
发表时间:
2006
期刊:
電気学会論文誌E 126-E・4(掲載決定)
影响因子:
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作者:
Takashi Shigematsu;Minoru K.Kurosawa
通讯作者:
Minoru K.Kurosawa