Laser heterodyne interferometer with rotational error compensation for precision displacement measurement
Laser heterodyne interferometer with rotational error compensation for precision displacement measurement
复制标题
带旋转误差补偿的激光外差干涉仪，用于精密位移测量
DOI：
10.1364/oe.26.000090
复制
发表时间：
2018-01-08
期刊：
影响因子：
3.8
通讯作者：
Teng, Xueying
中科院分区：
文献类型：
--
作者：
Zhang, Enzheng;Chen, Benyong;Teng, Xueying
A laser heterodyne interferometer with rotational error compensation is proposed for precision displacement measurement. In this interferometer, the rotational error of the measured object is obtained by using an angle detecting unit which is composed of a semi-reflective film, a polarizing beam splitter, a quarter-wave plate, a convex lens and a two-dimensional position sensitive detector. And the obtained rotational angle is used for compensating its influence on displacement measurement result. The optical configuration of the proposed interferometer is designed, and the mathematical model for displacement measurement with rotational error compensation is established. The coupling effect of axial displacement on rotational angle measurement and the rotational angle range used for compensation on displacement measurement are discussed in detail. To verify feasibility of the proposed interferometer, the experimental setup was constructed and several verification experiments were performed. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
