Area-selective assembly of high crystalline tin-doped–indium–oxide particles onto monolayer template

Area-selective assembly of high crystalline tin-doped–indium–oxide particles onto monolayer template
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高结晶锡掺杂氧化铟颗粒在单层模板上的区域选择性组装

DOI:
10.1116/1.1927537
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发表时间:
2005
期刊:
Journal of Vacuum Science and Technology
影响因子:
--
通讯作者:
A. Hozumi
A. Hozumi
中科院分区:
--
文献类型:
--
作者:
N. Shirahata;Y. Sakka;T. Uchikoshi;A. Hozumi

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通过静电相互作用,在水溶液中不经任何化学和物理刻蚀,在单层模板上成功地制备了结构清晰的掺锡氧化铟(ITO)微结构。在无水甲苯稀释的12.5vol% N-(6-氨基己基)-3-氨丙基三甲氧基硅烷[H2 N(CH 2)6 NH(CH 2)3Si(OCH 3)3,AHAPS]溶液中,在SiO2/Si衬底上形成了高度取向的氨基封端的自组装单分子膜(SAMs).采用172 nm的真空紫外光照射,在10 Pa的真空条件下,通过光掩模光刻30 min,制备了AHAPS-SAM化学模板。所制造的化学模板组成的AHAPS和SiOH覆盖的区域,分别作为静电排斥和吸引力的领域,提供一个单层模板的ITO颗粒的区域选择性组装。通过静电相互作用,ITO颗粒优先组装在硅醇区域上,而在硅醇区域上的组装被阻止。
Well-defined microstructures of tin-doped–indium–oxide (ITO) were successfully fabricated on a monoalyer template through an electrostatic interaction in aqueous media without any chemical and physical etching processes. Highly oriented amino-terminated self-assembled monolayers (SAMs) were formed on the SiO2∕Si substrate in a vapor of 12.5vol% solution of N-(6-aminohexyl)-3-aminopropyltrimethoxysilane [H2N(CH2)6NH(CH2)3Si(OCH3)3, AHAPS] diluted with absolute toluene. A chemical template of AHAPS–SAM was photolithographycally prepared using 172nm vacuum ultraviolet light under a reduced pressure of 10Pa for 30min through a photomask. The fabricated chemical template composed of AHAPS- and SiOH-covered regions served, respectively, as electrostatically repulsive and attractive areas to provide a monolayer template for the area-selective assembly of ITO particles. The ITO particles assembled preferentially onto the silanol regions through the electrostatic interaction, while their assembly was prevented on ...
有序分子的表面电势显微镜
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