Quantitative secondary electron energy filtering in a scanning electron microscope and its applications
Quantitative secondary electron energy filtering in a scanning electron microscope and its applications
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DOI：
10.1016/j.ultramic.2006.06.003
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发表时间：
2007-02-01
期刊：
影响因子：
2.2
通讯作者：
Humphreys, C. J.
中科院分区：
文献类型：
--
作者：
Kazemian, P.;Mentink, S. A. M.;Humphreys, C. J.
在扫描电子显微镜（SEM）的二维掺杂剂映射最近引起了人们的注意，由于其具有高空间分辨率，同时需要很少或没有样品制备的掺杂剂水平快速测量的能力。掺杂剂浓度可以从每个掺杂区域发射的二次电子的能量分布导出。然而，缺乏可靠的量化，当使用标准的SEM成像，迄今为止阻碍了广泛的应用的技术。本文的目的是解决这个问题的定量能量过滤使用通过透镜（TTL）检测器的场发射电子枪扫描电镜（FEG-SEM）。我们已经使用的线性位移中获得的SE能量分布与可变的样品偏置使用样品含有铜线，定义为实验检测器响应R-exp，量化的能量过滤。使用不同的实验条件，（2.42 +/- 0.04）
Two-dimensional dopant mapping in the scanning electron microscope (SEM) has recently attracted attention due to its ability to measure dopant levels rapidly with high spatial resolution while requiring little or no sample preparation. The dopant concentration could be derived from the energy distribution of secondary electrons emitted per doped region. However, the lack of reliable quantification, when standard SEM imaging is used, has so far hindered a wide application of the technique. This paper aims to resolve this problem with quantitative energy-filtering using a through-the-lens (TTL) detector in a field emission gun SEM (FEG-SEM). We have used the linear shift obtained in the SE energy distribution with variable specimen bias using sample containing copper wires, defined as the experimental detector response R-exp, to quantify the energy filtering. Using different experimental conditions, values of (2.42 +/- 0.04)