Multi-Probe Atomic Force Microscopy Using Piezoelectric Cantilevers
Multi-Probe Atomic Force Microscopy Using Piezoelectric Cantilevers
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DOI：
10.1143/jjap.46.5543
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发表时间：
2007-08
影响因子：
1.5
通讯作者：
N. Satoh;E. Tsunemi;Y. Miyato;K. Kobayashi;S. Watanabe;T. Fujii;K. Matsushige;Hirofumi Yamada
中科院分区：
文献类型：
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作者：
N. Satoh;E. Tsunemi;Y. Miyato;K. Kobayashi;S. Watanabe;T. Fujii;K. Matsushige;Hirofumi Yamada
我们开发了一种使用压电薄膜（PZT）悬臂的多探针原子力显微镜（AFM）系统。使用集成挠度传感器的自传感悬臂梁作为探头，显着降低了普通AFM设置的复杂性。利用电子束光刻技术制备了具有微加工x-y坐标图案的地址图样品。这些样品使我们能够通过所获得的图像的比较来评估探针之间的相对距离。虽然使用原始悬臂梁时，这些探针之间的最小距离为126 μ m，但使用经过聚焦离子束修饰的PZT悬臂梁将其减小到9.2 μ m。此外，我们发现通过确定每个悬臂梁的振幅变化来检测悬臂梁之间的相互作用力。
We developed a multi-probe atomic force microscopy (AFM) system using piezoelectric thin film (PZT) cantilevers. The use of self-sensing cantilevers with integrated deflection sensors as probes markedly reduced complexity in the ordinary AFM setup. Address-patterned samples having microfabricated x–y coordinate patterns, fabricated by electron beam lithography, were developed as well. These samples allow us to evaluate the relative distance between the probes by the comparison of the images obtained. Although the minimum distance between these probes was 126 µm using the original cantilevers, it was reduced to 9.2 µm by using the PZT cantilevers modified by a focused ion beam. Furthermore, we found that the interaction forces between the cantilevers were detected by determining the change in the amplitude of each cantilever.