Surface-normal electrostatic/pneumatic actuator
Surface-normal electrostatic/pneumatic actuator
复制标题
表面法向静电/气动执行器
DOI：
10.1109/memsys.1992.187703
复制
发表时间：
1992
期刊：
影响因子：
--
通讯作者：
H. Fujita
中科院分区：
文献类型：
--
作者：
K. J. Gabriel;O. Tabata;K. Shimaoka;S. Sugiyama;H. Fujita
描述了一种能够产生表面法向偏转的静电驱动的气动致动器。两个密封的、充满空气的同心室共享一个膜并通过通道连接，构成执行器。悬挂在外室上方的膜部分用作可移动电极板，而导电基板用作静电致动器的固定的相对电极板。当在两块板之间施加电压时，外室膜会向基板偏转，从而减少外室的体积。体积的减小导致外室和内室中的压力同时增加，导致内室上方的膜偏离基底。内室上的膜的偏转不仅与外膜偏转的方向相反，而且还被放大。原型表面法向执行器的内腔半径在 100 至 250 μm 之间，外腔半径在 200 至 750 μm 之间。<<ETX>>
An electrostatically driven, pneumatic actuator able to generate surface-normal deflections is described. Two sealed, air-filled, concentric chambers that share a membrane and are connected by channels make up the actuator. The portion of the membrane suspended over the outer chamber serves as the movable electrode plate while the conducting substrate acts as the fixed, opposing electrode plate of an electrostatic actuator. When a voltage is applied across the two plates, the outer-chamber membrane deflects towards the substrate, decreasing the volume in the outer chamber. The decreased volume produces a concomitant increase in the pressure in both the outer and inner chamber, causing the membrane over the inner chamber to deflect away from the substrate. The deflection of the membrane over the inner chamber is not only in the opposite direction to the outer membrane deflection, but is also amplified. Prototype surface-normal actuators have been fabricated with inner chamber radii ranging between 100 and 250 mu m and outer chamber radii ranging between 200 and 750 mu m.<<ETX>>