Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films prepared by Dual Reactive
Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films prepared by Dual Reactive
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双反应法制备钪氮化铝合金薄膜压电响应的增强
DOI：
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发表时间：
2012
期刊：
影响因子：
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通讯作者：
Nobuaki Kawahara
中科院分区：
文献类型：
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作者：
K. Kano;Akihiko Teshigahara;Y. Takeuchi;M. Akiyama;T. Kamohara;Nobuaki Kawahara
−202− 由于全球二氧化碳（CO₂）和氮氧化物（NOₓ）减排等环境问题日益严重，在控制汽车、飞机和涡轮发动机以及监测熔炉和反应堆系统方面，对高温压电传感器的工业需求急剧增加。此外，在燃煤发电厂和核电厂的健康监测中也需要这些传感器。众所周知，居里温度较高的压电材料具有较低的压电系数。此外，最高使用温度与压电系数d₃₃之间关系的研究结果（图1）表明，最高使用温度较高的压电材料具有较低的压电系数d₃₃。例如，广泛应用于许多电子设备的锆钛酸铅（PZT）的居里温度和压电系数d₃₃分别为250℃和410 pC/N。作为典型的高温压电材料之一的氮化铝（AlN）的最高使用温度和d₃₃分别为1150℃和5.5 pC/N。在一种材料中很难在高的最高使用温度和高的压电性之间取得良好的平衡。为了开发具有高压电性的高温压电材料已经做出了努力，然而，尚未发现有效的压电材料。在本文中，我们报道了一种在高的最高使用温度和高的压电性之间表现出良好平衡的高温压电材料。我们通过发现氮化钪铝（ScₓAl₁₋ₓN）合金薄膜中的相变，并利用双共溅射制备非平衡合金薄膜来实现这一点。Sc₀.₄₃Al₀.₅₇N合金表现出27.6 pC/N的大压电系数d₃₃，这是……
−202− The industrial demand of higher temperature piezoelectric sensors is drastically increasing in controlling automobile, aircraft and turbine engines, and monitoring of furnace and reactor systems , because environmental problems, such as carbon-dioxide (CO2) and nitrogen oxide (NOx) reduction, is becoming more serious globally. Also the sensors are desirable in health monitoring coal-fired electric generation plants and nuclear plants . It is generally known that piezoelectric materials with higher Curie temperature possess lower piezoelectric coefficient . Furthermore, the study result (Fig. 1) of relationship between maximum use temperature and piezoelectric coefficient d33 shows that the piezoelectric materials with higher maximum use temperature possess lower piezoelectric coefficient d33 . For example, the Curie temperature and piezoelectric coefficient d33 of lead zirconium titanate (PZT), which is widely used in many electronic devices, are 250oC and 410 pCN, respectively . The maximum use temperature and d33 of aluminum nitride (AlN), which is one of typical high temperature piezoelectric materials, are 1150oC and 5.5 pCN . It is difficult to achieve a good balance between high maximum use temperature and large piezoelectricity in a material. There has been a effort in order to develop high temperature piezoelectric materials with high piezoelectricity However, no effective piezoelectric materials has yet been found . In this communication, we report a high temperature piezoelectric material exhibiting a good balance between high maximum use temperature and large piezoelectricity. We achieved this through the combination of the discovery of a phase transition in scandium aluminum nitride (ScxAll-xN) alloy thin films, and the use of dual co-sputtering leading to nonequilibrium alloy thin films. Sc0.43Al0.57N alloys exhibit a large piezoelectric coefficient d33 of 27.6 pCN , which is