On-chip terahertz bandpass filter based on substrate integrated plasmonic waveguide
On-chip terahertz bandpass filter based on substrate integrated plasmonic waveguide
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基于衬底集成等离子体波导的片上太赫兹带通滤波器
DOI：
10.1016/j.rinp.2021.104553
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发表时间：
2021-08
影响因子：
5.3
通讯作者：
Ruimin Xu
中科院分区：
文献类型：
--
作者：
Huali Zhu;Yong Zhang;Longfang Ye;Yukun Li;Yuehang Xu;Ruimin Xu
在本文中，我们提出并演示了一种基于基板集成等离子体波导（SIPW）的太赫兹带通滤波器，采用标准 0.25 μm InP DHBT 制造工艺。在此设计中，在基板集成波导 (SIW) 的顶部金属层上蚀刻具有有效渐进频率降低的类似八木宇田天线的亚波长阵列，以支持欺骗表面等离子体激元 (SSPP) 模式。通过调整 SIW 和 SSPP 几何参数以分别独立调整低截止频率和高截止频率，可以轻松设计具有 SIPW 独特色散特性的带通传输。仿真结果表明，在208 GHz至265 GHz频率范围内，传输系数小于2 dB，带内反射系数优于20 dB。为了进一步验证所提出的设计，制造并测量了在微波频率范围内工作的几何尺寸按比例放大的类似带通滤波器。测量结果表明，良好的带通特性和高效率传播得到了验证。在13.5 GHz至18.4 GHz通带内，反射系数优于10 dB，最大传输系数为2 dB。我们的工作首次使用SIPW在太赫兹范围内提出了一种基于0.25μm InP DHBT的新型带通滤波器，其尺寸为900μm×285μm，在集成太赫兹等离子体器件中可能具有广泛的潜在应用。
In this paper, we propose and demonstrate a terahertz bandpass filter based on substrate integrated plasmonic waveguide (SIPW) using the standard 0.25-μm InP DHBT fabrication process. In this design, a Yagi-Uda antenna-like subwavelength array with effective asymptotic frequency reduction, is etched on the top metal layer of substrate integrated waveguide (SIW) to support a spoof surface plasmon polaritons (SSPPs) mode. The bandpass transmission with unique dispersion characteristics of the SIPW can be easily engineered by tuning the SIW and the SSPPs geometric parameters to independently adjust the low-cutoff and high-cutoff frequency, respectively. The simulated results show that, from the frequency range of 208 GHz to 265 GHz, the transmission coefficients is less than 2 dB, and the in-band reflection coefficients is better than 20 dB. To further verify the proposed design, a similar bandpass filter with geometry size scaled up operating in microwave frequency range is fabricated and measured. The measured results show that the great bandpass features and high-efficiency propagation are validated. In the passband of 13.5 GHz to 18.4 GHz, the reflection coefficients is better than 10 dB and the maximal transmission coefficients is 2 dB. Our work presents a novel 0.25-μm InP DHBT-based bandpass filter with dimensions of 900 μm × 285 μm in the terahertz range using SIPW for the first time, which may have extensive potential applications in integrated terahertz plasmonic devices.
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