A Novel Biosensor Based on Micromechanical Resonator Array for Lab-On-a-Chip Applications
A Novel Biosensor Based on Micromechanical Resonator Array for Lab-On-a-Chip Applications
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DOI：
10.1007/s11220-019-0261-z
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发表时间：
2019-12-01
影响因子：
2.2
通讯作者：
Shamsi, Mousa
中科院分区：
文献类型：
--
作者：
Eidi, Amin;Badri Ghavifekr, Habib;Shamsi, Mousa
由于机械谐振器的高阻尼特性，在液体环境中应用的报道很少。机械谐振器的大多数应用与它们在气体环境中的使用有关。提出了一种基于微机械谐振器阵列的质量检测生物传感器。传感器可以通过MEMS技术制造，例如标准多晶硅多用户MEMS工艺（PolyMUMP）。该传感器由链式机械耦合谐振器与静电致动元件和电容传感元件两侧。该传感器适用于数字微流体应用，其中被测液滴可以被引导到谐振器阵列上并影响振动的频率或相位延迟。因此，包含致动元件和感测元件的阵列的两侧都远离液滴。它提供了不与样品液滴电干扰的条件。液滴下的谐振器的振动方向是这样的，导致轻的滑膜阻尼，而不会导致强的挤压膜阻尼。商业有限元工具COMSOL Multiphysics被用来分析所提出的传感器的振动行为，并验证其功能。给出了该传感器的频率响应和质量灵敏度。
Mechanical resonators are rarely reported to be used in liquid environment due to high damping. Most applications of mechanical resonators are related to their use in the gaseous environment. In this paper, a novel mass detective biosensor is proposed for Lab-On-a-Chip applications based on micromechanical resonator array. The sensor can be fabricated by MEMS technology such as standard Polysilicon Multi User MEMS Process (PolyMUMPs). The sensor consists of chained mechanically coupled resonators with electrostatic actuating elements and capacitive sensing elements on both sides. The sensor is suitable for digital microfluidic applications which an under test droplet can be led over the resonator array and affect the frequency or the phase delay of vibration. Thus, both sides of the array containing the actuating and sensing elements stay away from the droplet. It provides conditions that do not electrically interfere with the sample droplet. The vibration direction of resonators under liquid droplet is such that causes light slide film damping and does not cause strong squeeze film damping. The commercial finite element tool COMSOL Multiphysics is used to analyze the vibration behavior of proposed sensor and verify its functionality. The results are presented for the frequency response and mass sensitivity of the biosensor.